VAT VACUUM VALVES AG, HAAG

Info

Projects
Clean room ISO 6 / Plant II
construction time
2017
Description
The clean room with class ISO 6 material and personnel lock, material hatch was integrated into Plant II as a turnkey solution. Compact design, location of the technology on the clean room ceiling, 100% integration of all necessary media in the inventory
Technical data
Clean room dimensions: 11 mx 11 m Air conditioning: 8.000 m³/h, humidification and dehumidification, pressure maintenance, particle monitoring